Tomas Kubart
Senior Lecturer/Associate Professor at Institutionen för elektroteknik; Fasta tillståndets elektronik
- Telephone:
- +46 18 471 72 57
- E-mail:
- tomas.kubart@angstrom.uu.se
- Visiting address:
- Ångströmlaboratoriet, Lägerhyddsvägen 1
75237 UPPSALA - Postal address:
- Box 65
751 03 UPPSALA
- ORCID:
- 0000-0003-2679-2387
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Short presentation
My research is focused on synthesis of materials by magnetron sputtering. I am primarily interested in the physics of reactive sputtering, processes taking place at the surfaces and ion surface interaction especially in HiPIMS. Part of my work is also synthesis of various thin films. These are especially oxides for electronics and optics, and sulfides for photovoltaics.
Publications
Selection of publications
- Highly conductive ultrathin Co films by high-power impulse magnetron sputtering (2018)
- Ion induced stress relaxation in dense sputter-deposited DLC thin films (2017)
- Evolution of sputtering target surface composition in reactive high power impulse magnetron sputtering (2017)
- Low-temperature synthesis of thermochromic vanadium dioxide thin films by reactive high power impulse magnetron sputtering (2016)
- Direct comparison of atomic layer deposition and sputtering of In2O3:H used as transparent conductive oxide layer in CuIn1-xGaxSe2 thin film solar cells (2016)
- Highly textured AlN thin films on Si by reactive High Power Impulse Magnetron Sputtering (2015)
- Understanding the discharge current behavior in reactive high power impulse magnetron sputtering of oxides (2013)
- Deposition of hematite Fe2O3 thin film by DC pulsed magnetron and DC pulsed hollow cathode sputtering system (2013)
- Effects of Back Contact Instability on Cu2ZnSnS4 Devices and Processes (2013)
- Conformal Ni-silicide formation over three-dimensional device structures (2012)
Recent publications
- Photocatalytic activity of TiO2 deposited by reactive HiPIMS with long target-to-substrate distance (2023)
- Atomic Layer Deposition of SnO2 as an Electron Transport Material for Solid-State P-type Dye-Sensitized Solar Cells (2022)
- Synthesis of BaZrS3 Perovskite Thin Films at a Moderate Temperature on Conductive Substrates (2022)
- Resilient moth-eye nanoimprinted antireflective and self-cleaning TiO2 sputter-coated PMMA films (2022)
- Wide-Gap Chalcopyrite Solar Cells with Indium Oxide-Based Transparent Back Contacts (2022)
All publications
Articles
- Photocatalytic activity of TiO2 deposited by reactive HiPIMS with long target-to-substrate distance (2023)
- Atomic Layer Deposition of SnO2 as an Electron Transport Material for Solid-State P-type Dye-Sensitized Solar Cells (2022)
- Synthesis of BaZrS3 Perovskite Thin Films at a Moderate Temperature on Conductive Substrates (2022)
- Resilient moth-eye nanoimprinted antireflective and self-cleaning TiO2 sputter-coated PMMA films (2022)
- Wide-Gap Chalcopyrite Solar Cells with Indium Oxide-Based Transparent Back Contacts (2022)
- On the description of metal ion return in reactive high power impulse magnetron sputtering (2021)
- Superconducting V3Si for quantum circuit applications (2021)
- Influence of substrate-induced thermal stress on the superconducting properties of V3Si thin films (2021)
- Chalcogenide Perovskite BaZrS3 (2020)
- Tailoring residual stresses in CrNx films on alumina and silicon deposited by high-power impulse magnetron sputtering (2020)
- High power impulse magnetron sputtering of diamond-like carbon coatings (2020)
- Correlation between Substrate Ion Fluxes and the Properties of Diamond-Like Carbon Films Deposited by Deep Oscillation Magnetron Sputtering in Ar and Ar plus Ne Plasmas (2020)
- Room Temperature Reactive Deposition of InGaZnO and ZnSnO Amorphous Oxide Semiconductors for Flexible Electronics (2020)
- A Strategy for Alleviating Micro Arcing during HiPIMS Deposition of DLC Coatings (2020)
- Antimony-Doped Tin Oxide as Transparent Back Contact in Cu2ZnSnS4 Thin-Film Solar Cells (2019)
- Metal Filling by High Power Impulse Magnetron Sputtering (2019)
- Back and front contacts in kesterite solar cells (2019)
- Mechanistic Insights into Solid-State p-Type Dye-Sensitized Solar Cells (2019)
- Mechanical Properties of Hydrogen Free Diamond-Like Carbon Thin Films Deposited by High Power Impulse Magnetron Sputtering with Ne (2018)
- Hard and dense diamond like carbon coatings deposited by deep oscillations magnetron sputtering (2018)
- Improving the morphological stability of nickel germanide by tantalum and tungsten additions (2018)
- Highly conductive ultrathin Co films by high-power impulse magnetron sputtering (2018)
- Effect of KF absorber treatment on the functionality of different transparent conductive oxide layers in CIGSe solar cells (2018)
- Bifacial Cu(In,Ga)Se2 solar cells using hydrogen‐doped In2O3 films as a transparent back contact (2018)
- Using hydrogen‐doped In2O3 films as a transparent back contact in (Ag,Cu)(In,Ga)Se2 solar cells (2018)
- Ultrafast dye regeneration in a core-shell NiO-dye-TiO2 mesoporous film (2018)
- Solid state p-type dye sensitized NiO-dye-TiO2 core-shell solar cells (2018)
- Discharge runaway in high power impulse magnetron sputtering of carbon (2018)
- Ion induced stress relaxation in dense sputter-deposited DLC thin films (2017)
- Formation of nickel germanides from Ni layers with thickness below 10 nm (2017)
- Evolution of sputtering target surface composition in reactive high power impulse magnetron sputtering (2017)
- Low-temperature synthesis of thermochromic vanadium dioxide thin films by reactive high power impulse magnetron sputtering (2016)
- Synthesis of hydrogenated diamondlike carbon thin films using neon-acetylene based high power impulse magnetron sputtering discharges (2016)
- Broadband Optical Absorption Caused by the Plasmonic Response of Coalesced Au Nanoparticles Embedded in a TiO2 Matrix (2016)
- Direct comparison of atomic layer deposition and sputtering of In2O3:H used as transparent conductive oxide layer in CuIn1-xGaxSe2 thin film solar cells (2016)
- E-MRS 2015 Symposium EE (2016)
- Microstructural evolution of Au/TiO2 nanocomposite films (2015)
- Thin films composed of gold nanoparticles dispersed in a dielectric matrix (2015)
- Thin films composed of Ag nanoclusters dispersed in TiO2 (2015)
- Deposition of highly textured AlN thin films by reactive high power impulse magnetron sputtering (2015)
- Reactively sputtered films in the CuxS–ZnS–SnSy system (2015)
- Large-area homogeneous periodic surface structures generated on the surface sputtered boron carbide thin films by femtosecond laser processing (2015)
- Optical properties and refractive index sensitivity of reactive sputtered oxide coatings with embedded Au clusters (2014)
- Investigation of ionized metal flux fraction in HiPIMS discharges with Ti and Ni targets (2014)
- Reactive sputtering of Cu2ZnSnS4 thin films - Target effects on the deposition process stability (2014)
- Increasing the carbon deposition rate using sputter yield amplification upon serial magnetron co-sputtering (2014)
- Mechanisms for compositional variations of coatings sputtered from a WS2 target (2014)
- Phase formation and morphological stability of ultrathin Ni-Co-Pt silicide films formed onSi(100) (2014)
- Understanding the discharge current behavior in reactive high power impulse magnetron sputtering of oxides (2013)
- Annealing behavior of reactively sputtered precursor films for Cu2ZnSnS4 solar cells (2013)
- Deposition of hematite Fe2O3 thin film by DC pulsed magnetron and DC pulsed hollow cathode sputtering system (2013)
- Extreme friction reductions during inital running-in of W-S-C-Ti low-friction coatings (2013)
- Rapid annealing of reactively sputtered precursors for Cu2ZnSnS4 solar cells (2013)
- Effects of Back Contact Instability on Cu2ZnSnS4 Devices and Processes (2013)
- Influence of Ti addition on the structure and properties of low-friction W–S–C coatings (2013)
- HiPIMS deposition of TiOx in an industrial-scale apparatus (2013)
- Reactive sputtering of precursors for Cu2ZnSnS4 thin film solar cells (2012)
- Modelling of sputtering yield amplification in serial reactive magnetron co-sputtering (2012)
- Influence of precursor sulfur content on film formation and compositional changes in Cu2ZnSnS4 films and solar cells (2012)
- A Detrimental Reaction at the Molybdenum Back Contact in Cu2ZnSn(S,Se)4 Thin-Film Solar Cells (2012)
- Conformal Ni-silicide formation over three-dimensional device structures (2012)
- Effect of peak power in reactive high power impulse magnetron sputtering of titanium dioxide (2011)
- Hysteresis and process stability in reactive high power impulse magnetron sputtering of metal oxides (2011)
- Sputter yield amplification by tungsten doping of Al(2)O(3) employing reactive serial co-sputtering (2011)
- Epitaxy of Ultrathin NiSi2 Films with Predetermined Thickness (2011)
- Epitaxy of Ultrathin NiSi2 Films with Predetermined Thickness (2011)
- Studies of hysteresis effect in reactive HiPIMS deposition of oxides (2011)
- Synthesis and characterization of (0001)-textured wurtzite Al(1-x)B(x)N thin films (2011)
- Chemical Insights into the Instability of Cu(2)ZnSnS(4) Films during Annealing (2011)
- ERD analysis and modification of TiO2 thin films with heavy ions (2010)
- Modelling of low energy ion sputtering from oxide surfaces (2010)
- Modelling of sputtering yield amplification effect in reactive deposition of oxides (2010)
- Reactive sputtering of SiO2–TiO2 thin film from composite Six/TiO2 targets (2010)
- Localised modifications of anatase TiO2 thin films by a Focused Ion Beam (2010)
- Implantation of anatase thin film with 100 keV 56Fe ions (2009)
- Influence of the target composition on reactively sputtered titanium oxide films (2009)
- Reactively sputtered ZrN for application as reflecting back contact in Cu(In,Ga)Se-2 solar cells (2009)
- High rate reactive magnetron sputter deposition of titanium oxide (2008)
- Experiments and modeling of dual reactive magnetron sputtering using two reactive gases (2008)
- A model of DC reactive magnetron sputtering for graded solar thermal absorbers (2008)
- Nanoscale colour control (2008)
- Direct current magnetron sputtering deposition of nanocomposite alumina – zirconia thin films (2008)
- Modelling of Magnetron Sputtering of Tungsten Oxide with Reactive Gas Pulsing (2007)
- Dynamic behaviour of the reactive sputtering process (2006)
- Process Stabilization and Increase of the Deposition Rate in Reactive Sputtering of Metal Oxides and Oxynitrides (2006)
Chapters
Conferences
- Organs-on-Chip System with Integrated Transparent Conductive Oxide Electrodes (2018)
- Scalability Study of Nickel Germanides (2016)
- Industrial Scale Deposition of Diamond-like Carbon Thin Films using Ne-based HiPIMS Discharge (2015)
- Low-temperature synthesis of thermochromic vanadium dioxide thin films using reactive magnetron sputtering (2015)
- Metallization of nanostructures by High Power Impulse Magnetron Sputtering (2015)
- Highly textured AlN thin films on Si by reactive High Power Impulse Magnetron Sputtering (2015)
- Magnetron sputtering of InGaZnO and ZnSnO amorphous oxide semiconductors (2015)
- Deposition of thermochromic vanadium dioxide thin films by reactive high power impulse magnetron sputtering (2014)
- Measurement of Ionized Metal Flux Fraction in HiPIMS by Retarding Field QCM Analyzer (2014)
- Dynamics of the sputtering target surface evolution in reactive HiPIMS (2014)
- Reactive HiPIMS of Oxides: Hysteresis and Discharge behaviour (2014)
- Thin AlN films deposited by reactive HiPIMS and pulsed DC sputtering – a comparative study (2014)
- Reactively sputtered films in the CuxS–ZnS–SnSy system: From metastability to equilibrium (2014)
- Reactive magnetron sputtering (2013)
- Investigation of ionized metal flux fraction in HiPIMS discharge with Ti and Ni target (2013)
- Extreme friction reductions during inital running-in of W-S-C-Ti low-friction coatings (2013)
- Understanding the discharge current behavior in reactive high power impulse magnetron sputtering of oxides (2012)
- Reactive sputtering of Fe2O3 thin films by high power pulsed plasma systems (2012)
- Modelling of reactive magnetron sputtering: Towards comprehensive model (2012)
- Reactive magnetron sputtering of precursors for CZTS solar cells (2012)
- High rate reactive magnetron sputtering of oxides using sputtering yield amplification (2012)
- HiPIMS deposition of TiOx in an industrial-scale apparatus: effects of target size and deposition geometry on hysteresis (2012)
- Mechanisms responsible for compositional variations of films sputtered from a WS2 target (2012)
- Hysteresis effect in reactive high power impulse magnetron sputtering of metal oxides (2011)
- Nanocomposite coatings consisting of noble metal nanoclusters embedded into a dielectric matrix by reactive HIPIMS (2011)
- Ion irradiation-induced modification of TiO2 thin films (2011)
- Implantation and surface modification of TiO2 by a Focused Ion Beam (2011)
- Process modelling for reactive magnetron sputtering (2011)
- Modelling of target effects in reactive HIPIMS (2011)
- Serial magnetron co-sputtering: Sputtering yield amplification and process modelling (2011)
- Synthesis of c-tilted AlN films with a good tilt and thickness uniformity (2011)
- Sputter Yield Amplification of reactively sputtered TiO2 (2011)
- Quaternary W-S-C-Ti films for tribological applications (2011)
- Sputtering yield amplification in reactive sputtering (2010)
- Studies of TiN films deposited by HIPIMS at different substrate temperatures and substrate bias (2010)
- Studies of hysteresis effect in reactive HiPIMS deposition of oxides (2010)
- Molecular dynamics simulations of low energy Ar sputtering of TiO2 surfaces (2010)
- Sputtering Yield Amplification in Reactive Serial Co-Sputtering (2010)
- Preferential Sputtering of Oxides and Target Design for Stable Reactive Magnetron Deposition of Oxides (2009)
- Decorative Oxide Coatings (2009)
- Studies and Modelling of Surface Modifications of Different Oxides During Ion Bombardmen (2009)
- Stable High Rate Reactive Sputter Deposition of Aluminium Oxide from Segmented Targets of Aluminium and Aluminium Oxide (2009)
- Damage formation in TiO2 by heavy ions (2008)
- Magnetic behaviour of Fe implanted TiO2 thin films (2008)
- On the high rate reactive sputtering of substoichiometric titanium oxide targets (2007)
- Experiments and modelling of reactive sputtering using two reactive gases and two targets (2007)
- A model of DC reactive magnetron sputtering for graded solar thermal absorbers (2007)
- Advanced Process Modelling of the Rotating Magnetron (2006)
- Dynamic Modelling of Reactive Magnetron Sputtering (2006)
- State of the art in Reactive Magnetron Sputtering (2006)
- Modelling of Magnetron Sputtering of Tungsten Oxide with Reactive Gas Pulsing (2006)
- Modelling of Sputter Erosion Rate Enhancement from Ceramic Targets (2004)
